JPH01165625U - - Google Patents
Info
- Publication number
- JPH01165625U JPH01165625U JP6248888U JP6248888U JPH01165625U JP H01165625 U JPH01165625 U JP H01165625U JP 6248888 U JP6248888 U JP 6248888U JP 6248888 U JP6248888 U JP 6248888U JP H01165625 U JPH01165625 U JP H01165625U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- vacuum chamber
- electrode
- ashing device
- plasma ashing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004380 ashing Methods 0.000 claims 3
- 230000005684 electric field Effects 0.000 claims 1
- 239000012212 insulator Substances 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6248888U JPH01165625U (en]) | 1988-05-12 | 1988-05-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6248888U JPH01165625U (en]) | 1988-05-12 | 1988-05-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01165625U true JPH01165625U (en]) | 1989-11-20 |
Family
ID=31288096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6248888U Pending JPH01165625U (en]) | 1988-05-12 | 1988-05-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01165625U (en]) |
-
1988
- 1988-05-12 JP JP6248888U patent/JPH01165625U/ja active Pending